Ultrasonic Sprayer Sprays Photoresist on Chip
Ultrasonic Sprayer Sprays Photoresist on Chip – Cheersonic
Ultrasonic sprayer is used in chip manufacturing to spray photoresist, which is a critical step for creating tiny patterns and structures. Here are the basic steps and precautions for ultrasonic sprayer to spray photoresist on chip:
Steps:
- Equipment and preparation: Make sure the ultrasonic sprayer is clean and in good working condition. Prepare the photoresist solution and pour it into an appropriate container.
- Chip preparation: Before spraying, clean and pre-treat the chip surface to ensure that there is no oil, oxide or other impurities.
- Ultrasonic spraying: Inject the photoresist solution into the spray gun of the ultrasonic sprayer. Ultrasonic vibrations break the solution into tiny atomized particles. Adjust the spraying parameters such as spraying speed, pressure and distance to obtain the desired coating thickness and uniformity.
- Drying and curing: After spraying, the chip is placed under appropriate conditions for drying and curing. This process involves removing the solvent and forming a solid coating of photoresist on the chip surface.
- Post-processing: Further post-processing steps such as heat treatment or other chemical treatments may be required to optimize the performance of the photoresist as needed.
Notes:
- Solution stability: Ensure the stability and proper viscosity of the photoresist solution in order to obtain a uniform coating.
- Spraying parameter adjustment: According to the size of the chip and the desired coating performance, the spraying parameters are adjusted appropriately.
- Coating uniformity: Ultrasonic spraying helps to obtain a uniform coating, but the spraying parameters need to be carefully controlled to ensure consistent coating quality.
- Drying and curing conditions: Ensure proper drying and curing conditions so that the photoresist coating is firmly attached to the chip.
- Safety and environmental protection: Always follow the guidelines for safety and environmental protection when using chemicals and performing laboratory operations. Use appropriate personal protective equipment and ensure good laboratory ventilation.
Spraying photoresist on chips with an ultrasonic sprayer is a precise and effective technology that provides important support for the creation of micro-patterns in the chip manufacturing process. This method has broad application prospects in the semiconductor industry.
About Cheersonic
Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.
Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.
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