Spray Photoresist Tool

Spray Photoresist Tool – Ultrasonic Spray System – Cheersonic

UAM4000L is a fully enclosed independent ultrasonic coating system for spraying photoresist onto 4″, 6″ and 8″ wafers in the development and manufacturing of precision semiconductors. The system has high uniformity, even This is also true for difficult parts with high aspect ratios.

Cheersonic’s UAM4000L is designed for processes where spin coating cannot provide sufficiently deep grooves with high aspect ratio MEM uniform coverage. UAM4000L has many proprietary features specifically configured for these spraying processes. UAM4000L is equipped with Cheersonic’s patented ultrasonic nozzle, with integrated exhaust device and cleaning function, and can effectively prevent overspray, this system is very suitable for precision photoresist spraying process. Ultrasonic nozzles have soft atomized droplets and targeted spraying characteristics, which can reduce material consumption by up to 90% without clogging, with highly repeatable performance and almost no waste.
https://cheersonic-liquid.com/en/electronics/photoresist-coating/