Spray Coating of Photoresist

Spray coating of photoresist for realizing through-wafer interconnects

A spray coating process has been developed to get a good coverage coating on the vias. The photolithographic patterning inside the via and development process are investigated and optimized.

Spray Coating of Photoresist - Spray Coating Process - Cheersonic
UAM4000L Ultrasonic Spray Coating System

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