Si-based and SiC-based manufacturing contamination issues
Si-based and SiC-based manufacturing contamination issues – Cheersonic
First look at the pollution of silicon-based production. Many links in its production and operation involve environmental pollution, and a certain amount of waste water, waste gas, solid waste and noise will be generated during the production process. Waste water includes process waste water and waste gas treatment system waste water, and a certain amount of cleaning waste water is generated in each production link; waste gas includes slightly acidic waste gas, epitaxial waste gas, waste water treatment system waste gas and slightly alkaline waste gas, of which the slightly acidic waste gas mainly comes from stress removal , cleaning process, epitaxial waste gas comes from epitaxy link, waste water treatment system waste gas comes from waste gas treatment; solid waste mainly includes waste chemical packaging, waste quartz crucible, waste graphite thermal field, waste grinding wheel, waste diamond wire, etc., the production of solid waste The links include crystal pulling, grinding, polishing, waste water treatment and other links; the noise sources are mainly exhaust system fans, cooling towers, air compressors, air conditioning units, various pumps, etc.
Looking at silicon carbide pollution, the main processes of silicon carbide substrate material production involve raw material synthesis, crystal growth, ingot processing, crystal rod cutting, cutting wafer grinding, grinding wafer polishing, polishing wafer cleaning and other links, which do not belong to heavy pollution industries; The main pollutants are waste water (mainly including pickling cleaning waste water, waste gas purification waste water, chamfering cleaning waste water, grinding cleaning waste water, mechanical polishing cleaning waste water, domestic sewage, etc.), general solid waste (mainly including purification impurities, processing scraps, Domestic waste, etc.), hazardous waste (mainly including waste grinding fluid, waste cutting fluid, waste polishing fluid, etc.), waste gas (mainly including pickling waste gas, ethanol cleaning waste gas, organic waste gas, etc.), noise, etc. The main methods of pollutant treatment in the company are: waste water is discharged to the municipal water purification plant for further treatment after being treated by the sewage treatment station; the domestic waste in the general solid waste is entrusted to the sanitation department for treatment, and the others are reused through the recycling unit; hazardous waste is entrusted to Qualified third-party agencies handle; waste gas is discharged through sewage devices in compliance with regulations; noise is handled by workshop sound insulation measures.
Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.
