Photoresist Spray Using Ultrasonics

Photoresist Spray Using Ultrasonics. Improvement of Photoresist Film Coverage on High Topology Surface with Spray Coating Technique

The direct ultrasonic spray system includes an ultrasonic spray nozzle, which generates a distribution of droplets of micrometer size. During spray coating, the wafer is rotated slowly while the swivel arm of the spray coating unit is moved across the wafer. The low spinning speed (30-60 rpm) is to minimize the centrifugal force. The rotation also allows resist coverage in all angles of the cavities. Because the parts are static, no residual stresses in the coating are encountered as in spinning and the meniscus problem is significantly reduced.

Recommended Machine
UAL100 ultrasonic dispersion liquid supply system
UAM3000 Ultrasonic Bracket Spraying Machine
UAM4000 small desktop ultrasonic spraying machine
UAM4000L Ultrasonic Precision Spraying Machine
UAM6000 Ultrasonic Large Spraying Machine
UAM7000 Ultrasonic Balloon Guide Wire Spraying Machine
UAM8000 ultrasonic assembly line spraying machine