Photoresist Coating Systems For Semiconductor Lithography

Automatic ultrasonic spray nozzle spray photoresist coating systems for semiconductor lithography.

My company, Cheersonic Ultrasonics Co., Ltd, is a pioneer and expert in the Research & Development on the ultrasonic application for various industries, such as medical, new energy, electronics, nano ect.

In recent decade, we found Cheersonic Ultrasonic Coating technology were getting more and more popular among global medical, new energy, electronics, nano industries, such as fuel cell, solar cell, stent, blood, PCB ect. Cheersonic ultrasonic coating equipment have been growing very quickly in the local and international markets, for now, there are almost 40 countries (universities, institutes, labs etc) installed the up-to-date ultrasonic coating machines from Cheersonic.

Regarding the photoresist coating machine, we recommend the benchtop ultrasonic coating UAM4000L. The application as below:

1. The coating area could up to 300×300 mm.
2. There will be installed one set of UCW120 ultrasonic system. The coating width about 10-60 mm.
3. Vacuum adsorption plate with the heating plate (heating up to 150 degrees Celsius).
4. Continuous pump (Auto Refill) with 25 ml syringe
5. Laser pointer
6. Yellow light inside work area
7. Approved by CE certification
8. Online demo for instruction for installation and programming
9. One -year warranty. 24X7 online remote support.