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Coating Photoresist on Glass Substrate
Coating Photoresist on Glass Substrate Innovative application of ultrasonic coating equipment for coating photoresist on glass With the rapid development of micro nano manufacturing technology, photolithography plays a crucial role in fields such as semiconductors, optical devices, and microelectromechanical systems (MEMS). As the core material in photolithography, the uniformity, accuracy, and adhesion to the substrate of photoresist directly affect the performance and yield of the final product. In this context, [...]