Ultrasonic spray pyrolysis for depositing TCO

Ultrasonic spray pyrolysis equipment for depositing TCO chemistries.

Uniform thin film Indium Tin Oxide (ITO), Aluminum Doped Zinc Oxide (AZO), Zinc Oxide (ZnO), and Fluorine Doped Oxide layers are often created using an ultrasonic spray pyrolysis technique. This unique process demands specialized coating equipment to create necessary coating thickness and morphology, spraying corrosive solutions in a high temperature environment.

In a high temperature ultrasonic spray pyrolysis process, precursor solutions such as Aluminum Zinc Oxide are sprayed onto a substrate heated to approximately 300-500 degrees Celsius. The solvent is evaporated in transit and the ZnO crystalline film is grown on the substrate surface, often soda-lime or other glass. Substrate temperature often dictates the morphology characteristics of the film.

Ultrasonic spray pyrolysis for depositing TCO - Cheersonic

About Cheersonic

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.

The Company’s solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.

Cheersonic’s growth strategy is focused on leveraging its innovative technologies, proprietary know-how, unique talent and experience, and global reach to further develop thin film coating technologies that enable better outcomes for its customers’ products and processes. For further information, visit https://cheersonic-liquid.com/.