Zeolite Thin Films Spray

Zeolite Thin Films Spray.  High-throughput fabrication of zeolite thin films via ultrasonic nozzle spray deposition

Zeolite thin films with ordered nanopores and a low dielectric constant can serve as an insulation layer in microelectronic devices. Herein, we report on a scalable method, ultrasonic nozzle spray deposition, which addresses this issue. A high-frequency standing wave introduced by the ultrasonic nozzle produces uniform sized droplets of the cast suspensions at a scale of tens to hundreds of micrometers, which results in a uniform thin film following the removal of the solvent. We focus on the deposition of thin films comprising pure-silica zeolite MFI on a silicon wafer substrate. We systematically investigated how the quality of the zeolite thin films is affected by the composition of the cast suspensions and UAM4000L operating parameters.

Ultrasonic Nozzle Spray Deposition Video

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